F446222
Lithium tantalum ethoxide , 5 , 127503-04-2
CAS NO.：127503-04-2
Empirical Formula: C12H30LiO6Ta
Molecular Weight: 458.25
MDL number: MFCD00210630
| Pack Size | Price | Stock | Quantity |
| 25ml | RMB1844.00 | In Stock |
|
| 100ml | RMB5185.60 | In Stock |
|
| others | Enquire |
Update time: 2022-07-08
PRODUCT Properties
| Boiling point: | 230°C/0.2mm |
| Flash point: | 230°C/0.2mm |
| form | Liquid |
| color | Pale yellow |
| Water Solubility | Decomposes in water. |
| Sensitive | Moisture Sensitive |
| Exposure limits | ACGIH: STEL 1000 ppm OSHA: TWA 1000 ppm(1900 mg/m3) NIOSH: IDLH 3300 ppm; TWA 1000 ppm(1900 mg/m3) |
Description and Uses
Lithium tantalum ethoxide is a precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods.
Safety
| Symbol(GHS) |  GHS02 |
| Hazard statements | H225 |
| Precautionary statements | P210-P240-P241-P280a-P303+P361+P353-P501a |
| RIDADR | UN3274 |
| HazardClass | 3 |
| PackingGroup | II |
