S315879
Tetrakis(dimethylamido)hafnium(IV) , packagedforuseindepositionsystems , 19782-68-4
| Pack Size | Price | Stock | Quantity |
| 25g | RMB16992.69 | In Stock |
|
| others | Enquire |
Update time: 2022-07-08
PRODUCT Properties
| Melting point: | 26-29 °C(lit.) |
| Boiling point: | 85°C/0.1mm |
| Density | 1.098 g/mL at 25 °C |
| Flash point: | 109 °F |
| form | crystal |
| color | colorless to pale yellow |
| Specific Gravity | 1.40 |
| Hydrolytic Sensitivity | 8: reacts rapidly with moisture, water, protic solvents |
| Sensitive | moisture sensitive, store cold |
| InChIKey | ZYLGGWPMIDHSEZ-UHFFFAOYSA-N |
| CAS DataBase Reference | 19782-68-4 |
Description and Uses
Used as precursor for atomic layer deposition of Hafnium Oxide nanolaminates, which are used as a reploacement for Silicon oxide in semiconductor devices.
Safety
| Symbol(GHS) |   GHS02,GHS05 |
| Signal word | Danger |
| Hazard statements | H228-H261-H314 |
| Precautionary statements | P210-P231+P232-P280-P305+P351+P338-P370+P378-P402+P404 |
| Hazard Codes | F,C |
| Risk Statements | 11-14-34 |
| Safety Statements | 6-26-36/37/39-43-45 |
| RIDADR | UN 3396 4.3/PG 2 |
| WGK Germany | 3 |
