Tetramethylammonium hydroxide solution , 10wt.%inH2O , 75-59-2
Synonym(s):
TMAH solution
CAS NO.：75-59-2
Empirical Formula: C4H13NO
Molecular Weight: 91.15
MDL number: MFCD00008280
EINECS: 200-882-9
PRODUCT Properties
| Melting point: | °C |
| Boiling point: | 110 °C |
| Density | 0.866 g/mL at 25 °C |
| vapor pressure | 17.5 mm Hg ( 20 °C) |
| refractive index | n |
| Flash point: | 80 °F |
| storage temp. | Store below +30°C. |
| solubility | Methanol (Sparingly), Water (Slightly) |
| form | Solution |
| color | APHA: ≤10 |
| Odor | strong ammonia-like odor |
| PH | >13 (H2O, 20°C) |
| Water Solubility | Soluble in water. |
| Sensitive | Air Sensitive |
| Merck | 14,9224 |
| BRN | 3558708 |
| Stability: | Stable. Flammable. Incompatible with strong oxidizing agents, strong acids. |
| InChI | 1S/C4H12N.H2O/c1-5(2,3)4;/h1-4H3;1H2/q+1;/p-1 |
| InChIKey | WGTYBPLFGIVFAS-UHFFFAOYSA-M |
| SMILES | [OH-].C[N+](C)(C)C |
| CAS DataBase Reference | 75-59-2(CAS DataBase Reference) |
| EPA Substance Registry System | Tetramethylammonium hydroxide (75-59-2) |
Description and Uses
Tetramethylammonium hydroxide is a solid in the hydrated form or a colorless liquid with a strong ammonia-like odor. It is soluble in water, and corrosive to metals and tissue.
Tetramethylammonium hydroxide is used to produce tetramethyl-ammonium azide. It is used as an anisotropic etchant of silicon, basic solvent in the development of acidic photoresist in photolithography process, as surfactant in the synthesis of ferrofluid and as a polarographic reagent. It finds application in the production of organic silicon, where it is used for computer silicon wafer surface brightener and cleaning agent. It is also involved in the purification of some metallic elements.
Tetramethylammonium hydroxide solution (25 wt.% solution in water) may be used as a base for pH adjustment to obtain hexagonal mesoporous aluminophosphate (TAP).
Safety
| Symbol(GHS) |     GHS02,GHS05,GHS06,GHS08 |
| Signal word | Danger |
| Hazard statements | H226-H300+H310-H314-H331-H370-H372-H412 |
| Precautionary statements | P210-P273-P280-P303+P361+P353-P304+P340+P310-P305+P351+P338 |
| target organs | Eyes,Central nervous system, Liver,thymus |
| PPE | Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter |
| Hazard Codes | C,T,F,T+,Xn |
| Risk Statements | 24/25-34-20/21/22-39/23/24/25-23/24/25-10-21/22-25-21-11-67-36-52-48/24-27/28-23-35-36/38 |
| Safety Statements | 45-36/37/39-26-16-36/37-28 |
| RIDADR | UN 3286 3/PG 2 |
| WGK Germany | 1 |
| RTECS | PA0875000 |
| F | 4.4-10-34 |
| TSCA | TSCA listed |
| HazardClass | 3 |
| PackingGroup | II |
| HS Code | 29239000 |
| Storage Class | 3 - Flammable liquids |
| Hazard Classifications | Acute Tox. 2 Dermal Acute Tox. 2 Oral Acute Tox. 3 Inhalation Aquatic Chronic 3 Eye Dam. 1 Flam. Liq. 3 Skin Corr. 1B STOT RE 1 Dermal STOT SE 1 |
| Hazardous Substances Data | 75-59-2(Hazardous Substances Data) |
