BD0817948
Tri-tert-butylhydrogenorthosilicate , 95% , 18166-43-3
Synonym(s):
TBS
| Pack Size | Price | Stock | Quantity |
| 1g | RMB128.00 | In Stock |
|
| 5g | RMB454.40 | In Stock |
|
| 25g | RMB1555.20 | In Stock |
|
| others | Enquire |
Update time: 2022-07-08
PRODUCT Properties
| Melting point: | 63-65 °C(lit.) |
| Boiling point: | 205-210 °C(lit.) |
| Density | 0,92 g/cm3 |
| Flash point: | >65°C |
| storage temp. | Inert atmosphere,Room Temperature |
| form | solid |
| pka | 11.78±0.53(Predicted) |
| Sensitive | moisture sensitive |
| Hydrolytic Sensitivity | 7: reacts slowly with moisture/water |
| InChI | 1S/C12H28O4Si/c1-10(2,3)14-17(13,15-11(4,5)6)16-12(7,8)9/h13H,1-9H3 |
| InChIKey | HLDBBQREZCVBMA-UHFFFAOYSA-N |
| SMILES | CC(C)(C)O[Si](O)(OC(C)(C)C)OC(C)(C)C |
Description and Uses
Tris(tert-alkoxy)silanols reacts with tetrakis(dimethylamino)-hafnium vapor(Hf(N(CH3)2)4) for vapor phase deposition of hafnium silicate glass films. Tris(tert-butoxy)silanol is used for atomic layer deposition (ALD) of highly conformal layers of amorphous silicon dioxide and aluminum oxide nanolaminates.
Safety
| Symbol(GHS) |  GHS07 |
| Signal word | Warning |
| Hazard statements | H335-H315-H319 |
| Precautionary statements | P264-P280-P305+P351+P338-P337+P313P-P264-P280-P302+P352-P321-P332+P313-P362 |
| PPE | Eyeshields, Gloves, type N95 (US) |
| Risk Statements | 36/37/38 |
| Safety Statements | 22-24/25 |
| WGK Germany | 3 |
| TSCA | No |
| Storage Class | 11 - Combustible Solids |
