F260322
Titanium silicide , 99.5 , 12067-57-1
CAS NO.：12067-57-1
Empirical Formula: Si3Ti5
Molecular Weight: 323.59
MDL number: MFCD01310208
EINECS: 235-082-9
| Pack Size | Price | Stock | Quantity |
| 50g | RMB2696.80 | In Stock |
|
| 250g | RMB11848.80 | In Stock |
|
| others | Enquire |
Update time: 2022-07-08
PRODUCT Properties
| Melting point: | 2130°C |
| Density | 4.3 g/cm3 |
| form | -325 Mesh Powder |
| Resistivity | 55 (ρ/μΩ.cm) |
| Water Solubility | Soluble in hydrofluoric acid. Insoluble in water. |
| Crystal Structure | Hexagonal |
| EPA Substance Registry System | Titanium silicide (Ti5Si3) (12067-57-1) |
Description and Uses
It is used as source, gate and drain contacts and local interconnections in CMOS integrated circuits. it is used in the C54 phase.
Safety
| Symbol(GHS) |   GHS02,GHS07 |
| Hazard statements | H228-H315-H319-H335 |
| Precautionary statements | P210-P261-P280-P305+P351+P338-P405-P501a |
| RIDADR | UN3178 |
| TSCA | Yes |
| HazardClass | 4.1 |
| PackingGroup | III |
