PRODUCT Properties
| Melting point: | -70°C |
| Boiling point: | 27 °C |
| Density | 1.58 |
| refractive index | 1.3000 (estimate) |
| storage temp. | Refrigerator |
| Water Solubility | Insoluble in water |
| form | clear liquid |
| color | Colorless to Almost colorless |
| Specific Gravity | 1.580 |
| CAS DataBase Reference | 559-40-0(CAS DataBase Reference) |
| EPA Substance Registry System | Octafluorocyclopentene (559-40-0) |
Description and Uses
Octafluorocyclopentene (C5F8), a "heavy" etching gas used in advanced semiconductor chip manufacturing processes, possesses the highest carbon count and the largest molecular weight among known fluorocarbon etching gases; its unique properties and molecular structure set it apart in the field of etching.
Octafluorocyclopentene, or perfluorocyclopentene, is mainly used for etching and cleaning semiconductors, and can participate in the preparation of organic photochromic materials. Octafluorocyclopentene is considered to be a competitive advantage as one of the next generation etching gases and the most attractive raw material for electronic devices. It may also be used in the synthesis of high-end dyes.
Safety
| Symbol(GHS) |    GHS06,GHS07,GHS08 |
| Signal word | Danger |
| Hazard statements | H301+H311+H331-H315-H319-H335-H371-H373 |
| Precautionary statements | P260-P271-P280 |
| Hazard Codes | Xi |
| Risk Statements | 36/37-36/37/38-48/20/21/22 |
| Safety Statements | 23-26-36/37/39 |
| RIDADR | 2810 |
| RTECS | GY6000000 |
| Hazard Note | Irritant |
| TSCA | TSCA listed |
| HazardClass | IRRITANT, GAS |
| HS Code | 29038900 |
