Tetrakis(dimethylamino)titanium(IV) , 3275-24-9

Synonym(s):
TDMAT;Tetrakis(dimethylamino)titanium(IV)

CAS NO.：3275-24-9

Empirical Formula: C2H7NTi

Molecular Weight: 92.95

MDL number: MFCD00014861

EINECS: 221-904-3

PRODUCT Properties

• Melting point: <4°C
• Boiling point: 50 °C0.5 mm Hg(lit.)
• Density: 0.947 g/mL at 25 °C(lit.)
• refractive index: 1.55
• Flash point: -22 °F
• storage temp.: Flammables area
• form: liquid
• Specific Gravity: 0.96
• color: yellow to orange
• Hydrolytic Sensitivity: 8: reacts rapidly with moisture, water, protic solvents
• Sensitive: Moisture Sensitive
• InChIKey: MNWRORMXBIWXCI-UHFFFAOYSA-N
• CAS DataBase Reference: 3275-24-9(CAS DataBase Reference)
• NIST Chemistry Reference: Tetrakis(dimethylamino)titanium(3275-24-9)
• EPA Substance Registry System: Methanamine, N-methyl-, titanium(4+) salt (3275-24-9)

Description and Uses

Tetrakis(dimethylamido)titanium(IV) (TDMAT) is a precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD)and titanium dioxide thin films by atomic layer deposition (ALD).TDMAT undergoes exothermal reaction with excess cyclopentadiene to yield tris(dimethylamido)(η5-cyclopentadienyl)titanium(IV).

Safety

• Symbol(GHS): GHS02,GHS05
• Signal word: Danger
• Hazard statements: H225-H260-H314
• Precautionary statements: P210-P223-P231+P232-P280-P303+P361+P353-P305+P351+P338
• Hazard Codes: F,C,Xi
• Risk Statements: 11-14-34
• Safety Statements: 16-26-36/37/39-43-45
• RIDADR: UN 3398 4.3/PG 1
• WGK Germany: 3
• TSCA: Yes
• HazardClass: 4.3
• PackingGroup: II
• HS Code: 29319090
• Excepted Quantities: Max Inner Pack (30g or 30ml) and Max Outer Pack (500g or 500ml)