T0080431
Tetrakis(dimethylamino)titanium(IV) , 3275-24-9
Synonym(s):
TDMAT;Tetrakis(dimethylamino)titanium(IV)
CAS NO.：3275-24-9
Empirical Formula: C2H7NTi
Molecular Weight: 92.95
MDL number: MFCD00014861
EINECS: 221-904-3
| Pack Size | Price | Stock | Quantity |
| 1g | RMB304.00 | In Stock |
|
| 5g | RMB880.00 | In Stock |
|
| others | Enquire |
Update time: 2022-07-08
PRODUCT Properties
| Melting point: | <4°C |
| Boiling point: | 50 °C0.5 mm Hg(lit.) |
| Density | 0.947 g/mL at 25 °C(lit.) |
| refractive index | 1.55 |
| Flash point: | -22 °F |
| storage temp. | Flammables area |
| form | liquid |
| color | yellow to orange |
| Specific Gravity | 0.96 |
| Sensitive | Moisture Sensitive |
| Hydrolytic Sensitivity | 8: reacts rapidly with moisture, water, protic solvents |
| InChI | 1S/4C2H6N.Ti/c4*1-3-2;/h4*1-2H3;/q4*-1;+4 |
| InChIKey | MNWRORMXBIWXCI-UHFFFAOYSA-N |
| SMILES | CN(C)[Ti](N(C)C)(N(C)C)N(C)C |
| CAS DataBase Reference | 3275-24-9(CAS DataBase Reference) |
| NIST Chemistry Reference | Tetrakis(dimethylamino)titanium(3275-24-9) |
| EPA Substance Registry System | Methanamine, N-methyl-, titanium(4+) salt (3275-24-9) |
Description and Uses
Tetrakis(dimethylamido)titanium(IV) (TDMAT) is a precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD)and titanium dioxide thin films by atomic layer deposition (ALD).TDMAT undergoes exothermal reaction with excess cyclopentadiene to yield tris(dimethylamido)(η5-cyclopentadienyl)titanium(IV).
Safety
| Symbol(GHS) |   GHS02,GHS05 |
| Signal word | Danger |
| Hazard statements | H225-H260-H314 |
| Precautionary statements | P210-P223-P231+P232-P280-P303+P361+P353-P305+P351+P338 |
| PPE | Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter |
| Hazard Codes | F,C,Xi |
| Risk Statements | 11-14-34 |
| Safety Statements | 16-26-36/37/39-43-45 |
| RIDADR | UN 3398 4.3/PG 1 |
| WGK Germany | 3 |
| TSCA | TSCA listed |
| HazardClass | 4.3 |
| PackingGroup | II |
| HS Code | 29319090 |
| Storage Class | 4.3 - Hazardous materials which set free flammable gases upon contact with water |
| Hazard Classifications | Flam. Liq. 2 Skin Corr. 1B Water-react 1 |
| REACH Registrations | Active |
| Excepted Quantities | Max Inner Pack (30g or 30ml) and Max Outer Pack (500g or 500ml) |
